| 摘要 |
PURPOSE: An LED manufacturing device is provided to improve the deposit efficiency of a semiconductor layer by controlling current and the amount of reaction gas flowed through a first duct. CONSTITUTION: A reacting gas supply unit supplies a reaction gas into a chamber(10). A gas discharge unit(20) discharges the gas inside the chamber to the outside. A high frequency-induction coil or a dielectric electrode is installed on the outside of the chamber. Boats are installed in the center of the chamber. A driving unit(50) drives the boats.
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