| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device and a three-dimensional shape measurement method capable of performing high-precision measurements. <P>SOLUTION: The three-dimensional shape measuring device 1 for measuring a three-dimensional shape of a measurement object 40 includes: a projection section 10 for projecting a lattice pattern of a pattern element 14 to the measurement object 40; and an imaging section 20 for imaging the lattice pattern projected to the measurement object 40, and the intervals of the lattice patterns are set unequal so that patterns at an equal interval are formed on a reference surface SP, when the lattice pattern is projected to the reference surface SP. <P>COPYRIGHT: (C)2010,JPO&INPIT |
