| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a washing method with a high cleaning degree capable of removing contaminants such as an ashed substance which cannot be removed by conventional washing methods. Ž<P>SOLUTION: The washing method for a material to be washed includes a heating/cooling process of heating/cooling the material to be washed in a furnace after a deposit on the material to be washed is removed by injecting solid carbonic acid particles to the material to be washed. The washing method includes an immersion process of immersing the heated/cooled material to be washed into pure water having a specific resistance of 15 MΩ or higher, and an ultrasonic vibration process of imparting ultrasonic vibrations to the material to be washed in the immersion process. The washing method includes a first drying process of drying the material to be washed under a nitrogen atmosphere of 50°C or higher after the washing. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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