| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a MEMS sensor that prevents damage to a movable section and has improved durability. <P>SOLUTION: In the MEMS sensor for joining a sensor chip substrate, where the movable section that is operated mechanically and a sensor element for electrically detecting the displacement of the movable section are formed, to a base substrate with a gap from the movable section, a recess is provided along a portion of the outer periphery of the movable section on a substrate junction surface. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
