| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro that is miniaturized, reduced in weight, and reduced in cost. <P>SOLUTION: A vibrator 100 includes a first electrode 120 perpendicular to the Coriolis direction. The vibrator 100 is displaced in the Coriolis direction by applying a bias signal to at least one of a second electrode 210 facing the first electrode 120 on one side of the Coriolis direction and a third electrode 220 facing the first electrode 120 on the other side of the Coriolis direction. The displacement of the vibrator 100 of the Coriolis direction is detected from the second electrode 210 and third electrode 220, and the existence of abnormality is self-diagnosed. Since the vibrator can be displaced and self-diagnosis is enabled, an abnormality of the vibrator itself can be diagnosed. A simple circuit is used, so that the size, weight and cost can be reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT |
