| 摘要 |
<P>PROBLEM TO BE SOLVED: To produce an optical module by MEMS (micro electro mechanical systems) processing technique. <P>SOLUTION: The optical module includes a substrate 10, an optical element 20 made directly in a predetermined area 11 of the substrate 10, and a piezoelectric element 30 formed directly along the outer periphery of the optical element 20 and the substrate 10, and the piezoelectric element 30 displaces the predetermined area 11 of the substrate 10, thereby the optical element 20 is driven and displaced in its optical axis direction or so that its optical axis is inclined. <P>COPYRIGHT: (C)2010,JPO&INPIT |
