| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid ejection head which controls a displacement amount of a piezoelectric actuator, and to provide a method for manufacturing the same. SOLUTION: The liquid ejection head includes: pressure chambers 11 communicated with nozzle holes for ejecting a liquid; a diaphragm formed above the pressure chambers and having first regions 33 overlapped with the pressure chambers 11; a first conductive layer 40 formed to extend in a first direction 200 in the first region 33 to have one end 41 in the first direction 200 inside the first region 33; a piezoelectric layer 50 formed to cover the first conductive layer 40; a second conductive layer 60 formed to overlap the first conductive layer 40 including the end 41 in the first region 33, covering a part of the piezoelectric layer 50 to have one end 61 in the first direction 200 inside the first region 33; and a first metal layer 71 formed on the second conductive layer 60. Variation of the displacement amount of the piezoelectric actuator is suppressed. COPYRIGHT: (C)2010,JPO&INPIT
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