| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam irradiation device in which the scanning position of laser light in a targeted area is accurately detected with a simple configuration. Ž<P>SOLUTION: The laser light emitted from a laser light source is entered into a mirror. An actuator pivotally moves the mirror into which laser light is entered, whereby the targeted area is scanned with the laser light. On the other hand, servo light emitted from a semiconductor laser 303 is entered into a hologram element 200. The hologram element 200 is pivotally moved with the pivotal movement of the mirror. A diffraction pattern is formed on an exit surface of the hologram element 200. A photodetector 309 receives servo light transmitted through the hologram element 200 to output a signal depending on a light receiving position of the servo light. Thus, the scan width of servo light on the photodetector 309 is increased and the light receiving position of the servo light on the photodetector 309 is accurately detected. As a result, the scanning position of the laser light in the targeted area is also accurately detected. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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