| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely absorb deviation caused by thermal expansion and thermal contraction at a low cost. Ž<P>SOLUTION: The vertical probe card is provided with: contacts which are brought into electrical contact with terminals of a member under test; a main board having on one side land sections which are brought into electrical contact with the basal ends of the contacts; and a support which brings the basal ends of a plurality of contacts into contact with the land section of the main substrate and supports them with their distal ends extending toward the terminals of the member under test. The land sections of the main board are formed large, and the adjacent ones are arranged includes: a basal end pin which is brought into contact with the land section of the main board; a distal end pin 22 which is brought into contact with the terminal of the member under test; and a connecting section 23 for supporting the basal end pin 21 and the distal end pin 22 to connect them with each other. The connecting section is formed in an S shape and supports the basal end pin and the distal end pin in an eccentric manner. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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