| 摘要 |
<P>PROBLEM TO BE SOLVED: To fully restrain an increase or variation of tension actually acting on a substrate by offsetting an inertial force acting on a movable frame as a moving part movable relative to a hand body, a second mounting arm, and a plurality of second clampers. Ž<P>SOLUTION: A pair of counter weights 33A, 33B are provided on the other side of the hand body 9 to move in a longitudinal direction L of a hand. A first connecting wire 39A (39B) connecting the counter weight 33A (33B) and the movable frame 19 is supported on each first pulley 35A (35B), and a second connecting wire 45A (45B) connecting the counter weight 33A (33B) and the movable frame 19 is supported on each second pulley 41A (41B). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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