| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer robot having a multistage concentric motor as a drive source, which has a small detector in the motor, can ensure a high level of arm controllability and can realize easy replacement of the detector. Ž<P>SOLUTION: The substrate transfer robot includes a drive having a first rotary motor 13 and a second rotary motor 14 for driving a robot arm disposed axially in a multistage manner. A rotary position detector in the first rotary motor 13 includes a first incremental encoder head 21 and rotational angle sensors 25a, 25b as absolute value position detectors of which the rotational position detection accuracy is lower than that of the first incremental encoder head 21. The rotary position detector in the second rotary motor 14 includes a second incremental encoder head 22 and rotational angle sensors 26a, 26b as absolute value position detectors of which the rotational position detection accuracy is lower than that of the second incremental encoder head 22. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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