| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of adjusting accurately an electrode area. <P>SOLUTION: Fixed electrodes 20a, etc., include respectively: a main electrode MP having a relatively large area; a plurality of auxiliary electrodes SP having a sufficiently smaller area than the main electrode MP; and a plurality of conductive parts BP having respectively a thinner width than each auxiliary electrode, for connecting electrically the main electrode MP to each auxiliary electrode SP. A method for adjusting the electrode area according to the width or the length of a groove formed on the fixed electrode as in a conventional example is not used, but a method for adjusting the electrode area according to the number of auxiliary electrodes SP separated electrically from the main electrode MP by cutting the conductive parts BP is used, to thereby adjust accurately the electrode area. <P>COPYRIGHT: (C)2010,JPO&INPIT |
