| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain a long life of a plasma electrode which is made of a metal rod, and generates plasma by receiving microwave propagated through a waveguide from a microwave generator on one side of the rod, and by making discharge between an electrode formed concentrically on the ground side on the other end side. <P>SOLUTION: The plasma generating nozzle 30 has an antenna 41 portion on the upper side of a plasma electrode 40 of rod shape which is arranged in a waveguide space H of a waveguide 20 and receives microwave, and the lower side of the plasma electrode 40 working as an inner electrode 42 with an outer electrode 31 arranged concentrically to it, and the treating gas supplied from a gas supply hole 35 into the internal space 32 between these is turned into plasma by the microwave. A ceramic flame spray layer 49 is formed at the lower end 421 of the inner electrode 42. Thereby, the ceramic flame spray layer 49 is adhered to the lower end 421 and covers stably the lower end 421, and can suppress evaporation and oxidation of the metal substrate against discharge. <P>COPYRIGHT: (C)2010,JPO&INPIT |
