| 摘要 |
PROBLEM TO BE SOLVED: To prevent a gap from occurring between the inner peripheral surface of a ceramic ring and the outer peripheral surface of a urethane lining due to the shrinkage of urethane resin. SOLUTION: A rotary table 30 includes a rotary table body 31 in a form of a rising peripheral rim, the ceramic ring 32 fixed along the inner periphery of the peripheral rim of the rotary table body 31, the urethane lining 33 formed to cover the inner surface of the rotary table body 31 and the inner peripheral surface of the ceramic ring 32, and a holding ring 34. The holding ring 34 is provided between the urethane lining 33 and the ceramic ring 32, and is made of a material with rigidity larger than a shrinkage force when a mold of the urethane resin is molded and with higher affinity with the urethane lining 33 than the ceramic ring 32. COPYRIGHT: (C)2010,JPO&INPIT |
