| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film-coated tool having excellent wear resistance by highly hardening, while securing reduction of compressive stress and close contactness in a thickened hard film. SOLUTION: In this hard film coated tool, the hard film is coated with a first hard film and a second hard film from a surface of a substrate. The first hard film is shown by (Al<SB>a</SB>Me<SB>100-a</SB>)<SB>e</SB>N<SB>f</SB>, where 35≤a≤65 and 0.85≤e/f≤1.25 are satisfied. The second hard film is shown by (Ti<SB>100-h</SB>B<SB>h</SB>)<SB>m</SB>N<SB>p</SB>, where 1≤h≤30 and 0.85≤m/p≤1.25 are satisfied. When plane spacings (nm) of (111) planes in X-ray diffraction of the first hard film and the second hard film are defined as d1 and d2, respectively, 1.01≤d2/d1≤1.05 is satisfied. The second hard film has a columnar structure where crystal grains have composition-modulated structures having composition differences in B component. COPYRIGHT: (C)2010,JPO&INPIT
|
