| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an adhesive chuck device hardly causing a problem that contrast of liquid crystal display becomes nonuniform and so on, wherein the adhesive chuck prevents the distance between both substrates such as glass substrates or film substrates from becoming nonuniform when sticking the substrates to each other. Ž<P>SOLUTION: This adhesive chuck device 1 includes adhesive members 12 on a base member 11 as shown in Figs.1(a), (b). The base member 11 includes a plurality of through-holes 13, and the through-holes 13 are used for supplying gas or the like used upon separating a substrate such as a glass substrate or a film substrate from the adhesive members 12 as described later. In an embodiment, the adhesive member 12 has a recessed part 14, and is structured to allow the gas or the like used upon the separation to be easily supplied. The adhesive member 12 holding the substrate expands and contracts. The adhesive member 12 includes an adhesive part and a non-adhesive part, and preferably contains urethane gel. It is preferable that the adhesive member 12 includes a pressing member therein. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
