| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning microscope that suppresses noise caused by vibration of a scanning means. Ž<P>SOLUTION: The scanning microscope 1 includes: a scanning means 8 for scanning light from a light source 2, an objective lens 13 for condensing light passing through the scanning means 8 onto a specimen 5, and a detector 6 for detecting the light from the specimen 5 via the objective lens 13. The scanning means 8 is attached to a housing 3a via a vibration damping component composed of a laminate of a viscoelastic material and a vibration damping material whose damping coefficient of vibration is greater than 1, or via the vibration damping component composed of the laminate and having a lubricative metal layer or a lubricative coating formed on its surface. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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