| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor measuring apparatus, improving accuracy in the measurements of physical quantities by the stable vibrations of a vibrator and noise removal, and also improving the yield of vibrators. SOLUTION: In the vibration sensor measuring apparatus, vibrators 102 (102a and 102b) in which physical quantities to be measured act between first fixed electrodes 100 (100a, 100b), with a bias voltage applied thereto, and second fixed electrodes 101 (101a, 101b), opposedly arranged at a predetermined interval, and which vibrate according to electrostatic attraction force acting between the first fixed electrodes and them, are provided. The first fixed electrodes are driven by a first drive signal generated on the basis of output signals of vibrators, and the second fixed electrodes are provided with a plurality of measuring systems driven by a second drive signal having a reversed phase with respect to that of the first drive signal. The vibrator in each measuring system is formed in such a way as to have a different natural frequency. Physical quantities are measured on the basis of output signals of the vibrators. COPYRIGHT: (C)2010,JPO&INPIT |
