| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a periodic structure which can produce a periodic structure in which each structural element elongates to a direction along a scanning direction using an uniaxial laser, and to provide a device therefor. <P>SOLUTION: In the method for producing a periodic structure where the surface of a material is irradiated with a femtosecond laser (irradiation light 1a) having energy density in the vicinity of machining threshold value, and including linear polarized light components, while overlapping the pulse irradiation region L, it is relatively moved to the surface of the material M, and, based on a periodic energy intensity distribution by the interference between the irradiation light 1a and surface scattered light or a plasma wave 1b, a periodic structure C is produced on the surface of the material, the relative movement is performed in such a manner that the condensing point to the surface of the material has a flat shape, and, regarding the elongating direction of the components of the periodic structure to be formed, the polarization direction is controlled so as to be 0 to 65 degrees to the major axis of the flat shape and also to be made into a direction along the moving direction of the condensing point. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
