| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method of a laminate having an aluminum oxide film excellent in surface smoothness. SOLUTION: The production method of the laminate is characterized in that the aluminum oxide film is formed on a substrate by bringing a solution for formation of an aluminum oxide film, the solution containing an aluminum source and a solvent in a state where a difference in the polarizability is ≤5, into contact with the substrate heated to a temperature equal to or higher than the temperature of forming an aluminum oxide film. COPYRIGHT: (C)2010,JPO&INPIT
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