摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new chip type piezoelectric vibration device in which holding and hermetic sealing of a piezoelectric vibration element can be reliably achieved. Ž<P>SOLUTION: The piezoelectric vibration device is composed of a piezoelectric diaphragm 1 with a frame of a rectangular shape in a plan view and metallic terminals 2 and 3 of a rectangular shape in a plan view. The piezoelectric diaphragm 1 with a frame has a tuning-fork type crystal diaphragm 11 at the center and has a structure in which a frame 12 around which a belt-like frame is circumferentially formed is formed. A metal film is formed on both sides of the frame 12. Covers 21 and 31 and bends 22 and 32 bent at a substantially right angle at one of the short sides are formed to the metallic terminals 2 and 3. Joining is achieved while the piezoelectric diaphragm 1 with the frame is sandwiched between the metallic terminals 2 and 3, thereby the frame inside is hermetically sealed while one terminal of the tuning-fork type crystal diaphragm is drawn out to a metallic terminal 2 side and the other terminal of the tuning-fork type crystal diaphragm is drawn out to a metallic terminal 3 side. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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