| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for approaching a probe and a sample, surely approaching them without a damage, as well as shortening a time required for approaching. SOLUTION: In detecting a displacement of a cantilever 2 by a displacement detecting mechanism 5 and allowing a probe 1 and a sample 8 to approach by a rough movement mechanism 13 or/and a vertical direction fine movement mechanism 11, an excitation mechanism 4 excites the cantilever 2 with a first excitation condition and the probe 1, the sample 8 are allowed to approach with a first stop condition, then the cantilever 2 is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe 1 and the sample 8 are allowed to approach until the second stop condition by the vertical direction fine movement mechanism 11 or/and the rough movement mechanism 13. COPYRIGHT: (C)2010,JPO&INPIT |
