| 摘要 |
PROBLEM TO BE SOLVED: To improve defoaming speed in a liquid jet apparatus. SOLUTION: The defoaming mechanism includes a defoaming chamber for capturing air bubbles in liquid, a deformable partition part having gas permeability, and a pressure adjusting chamber adjacent to the defoaming chamber via the partition part, whose in-chamber pressure changes. COPYRIGHT: (C)2010,JPO&INPIT |
