| 摘要 |
<P>PROBLEM TO BE SOLVED: To speedily measure distribution of transmittance in an object to be observed. Ž<P>SOLUTION: One illustrated embodiment of a measuring device includes: observation means (11, 13, 15, 17) for acquiring both of dark field images and bright field images from the object (25a) to be observed; a storage means for storing information indicating scattering efficiency of the object to be observed beforehand; and an arithmetic operation means for calculating the distribution of transmittance of the object to be observed, based on the dark field images and bright field images acquired by the observation means and information stored by the storage means in advance. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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