| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid ejection head which is easy to adjust in rigidity, and to provide a method for manufacturing thereof. SOLUTION: The liquid ejection head includes: a pressure chamber plate with a pressure chambers 11 communicated with nozzle holes 21 for ejecting a liquid; a diaphragm 30 formed above the pressure chamber plate and having a first surface 31 opposed to the pressure chamber plate and a second surface 32 of the opposite side to the first surface 31, with first regions 33 overlapped with the pressure chambers 11 on the second surface 32; a first conductive layer 40 formed so as to extend in a first direction 200 in the first region 33; a piezoelectric layer 50 formed so as to cover the first conductive layer 40; and a second conductive layer 60 formed so as to cover at least a part of the piezoelectric layer 50. The piezoelectric layer 50 is formed so as to overlap the first conductive layer 40 in the first region 33. COPYRIGHT: (C)2010,JPO&INPIT |
