| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect two-axis angular velocity precisely with high sensitivity. Ž<P>SOLUTION: Drive mass sections 4-7 are provided separately from a substrate 2 on the surface of the substrate 2. The drive mass sections 4-7 are disposed at positions that are symmetrical with respect to a center point O. The drive mass sections 4-7 are connected mutually by a connection beam 8 and detection sections 13-16 are connected to the connection beam 8. The detection sections 13-16 are supported by a support section 3 on the substrate 2 by detection beams 17-20 subjected to twist deformation in the two-axis directions. Then, the drive mass sections 4-7 that are adjacent circumferentially are vibrated mutually in opposite phases by vibration generation sections 9-12. When pieces of angular velocity Ω1, Ω2 are applied in this state, the detection sections 13-16 are displaced in a thickness direction of the substrate 2 with X and Y axes as a center for vibration. Displacement detection sections 21-24 detect a displacement in a thickness direction of the detection sections 13-16. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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