| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state image pickup device that is highly sensitive and maintains low smear despite being miniaturized. SOLUTION: The solid-state image pickup device includes: a photoelectric conversion region 2 formed on a silicon substrate 1; a reading region 3 for reading a charge from the photoelectric conversion region 2; a charge-transfer region 4 for transferring the read charge; and a charge-transfer electrode 7 formed above the charge-transfer region 4, wherein a light shielding film 10 is formed above the charge-transfer electrode 7, the light shielding film 10 includes an opening above the photoelectric conversion region 2, a reflection prevention film 8 is formed on the opening above the photoelectric conversion region 2 and on the charge-transfer electrode 7, an end portion, positioned on the charge-transfer electrode 7 side, of the reflection prevention film 8 formed on the opening does not extend up to below the light shielding film 10, and an end portion in the reading direction of the reflection prevention film 8 formed on the charge-transfer electrode 7 does not extend up to a sidewall of the charge-transfer electrode 7. COPYRIGHT: (C)2010,JPO&INPIT
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