| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an adhesive chuck device which prevents the distance between substrates from being uniform when the substrates such as a glass substrate and a film substrate are bonded with each other, and prevents non-uniform contrast in a liquid crystal display. Ž<P>SOLUTION: The adhesive chuck device 1 has adhesive members 12 on a base member 11 as shown in Fig.1(a), (b). The base member 11 includes a plurality of through holes 13, and the through holes 13 are used for inserting gas or a separation pin to be used for separating a substrate such as a glass substrate and a film substrate from each adhesive member 12. In the first embodiment, each adhesive member 12 has a recess 14 so that gas or a separation pin to be used for separation can be easily inserted. The adhesive member 12 for holding the substrate contains urethane gel. It is preferable that the adhesive member 12 has an adhesive part and a non-adhesive part on the same surface in contact with the substrate to be held. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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