| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve sensitivity of a surface acoustic wave type vibration sensor in a frequency domain other than a resonance frequency, and to elongate a radio-communicable distance. Ž<P>SOLUTION: In this vibration sensor including SAW (Surface Acoustic Wave) electrodes 3, the shape of a piezoelectric material body 1 having a cantilever structure is a wedged shape corresponding to a desired frequency to be detected, and since a body thickness is changed gradually from a support part 2 toward a tip part of the body, vibration intensity of the SAW electrodes 3 when an external vibration is applied is enhanced by a weight effect generated by change of a distance between the fulcrum and the gravity center of the cantilever structure in comparison with a case of using a piezoelectric material having a rectangular parallelepiped shape, and sensor sensitivity can be improved, and the radio-communicable distance can be elongated. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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