CONDUCTIVE NANOTUBE PROBE, ELECTRICAL CHARACTERISTICS EVALUATION APPARATUS USING THE SAME, AND SCANNING PROBE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a conductive nanotube probe with reduced electric resistance, and an electrical characteristics evaluation apparatus and a scanning microscope which use the probe. SOLUTION: A conical uniform metal film is disposed on a carbon nanotube jointed to a conductive base material by a metal to reduce electrical resistance from an end of the nanotube probe toward its root. The metal film may be a multilayered metal film of two or more layers. This conical structure allows a low-resistance conductive nanotube probe to be provided wherein only its end that makes contact in probing is reduced in diameter. COPYRIGHT: (C)2010,JPO&INPIT