| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively provide a plastic-based material having excellent functions such as a gas barrier property and a chemical resistance characteristic, the material having a large area. SOLUTION: The production method of the plastic-based material is characterized by carrying out a pretreatment process and then a film forming process. In the pretreatment process, high frequency voltage is applied to gas for pretreatment under normal pressure to generate discharge plasma and the discharge plasma is brought into contact with a base material 4 made of a plastic to activate a base material surface. In the film forming process, high frequency voltage is applied to atmospheric gas 6 under normal pressure to generate discharge plasma 7 and the discharge plasma 7 is brought into contact with the base material to form a uniform film made of an amorphous carbon-based raw material containing carbon atoms and hydrogen atoms as main constituent atoms. By this production method the uniform film made of the amorphous carbon-based raw material containing carbon atoms and hydrogen atoms as main constituent atoms can be formed on the base material surface, the film having a width of≥30 cm and an area of≥900 cm<SP>2</SP>. COPYRIGHT: (C)2010,JPO&INPIT |
