| 摘要 |
PURPOSE: A linear driving device having two chambers and a guide structure are provided to maintain the balanced position of a moving unit which does not receive the influence of peripheral magnetic bodies. CONSTITUTION: A linear driving device comprises a guide(1) and a counter slide. The guide has a rectangular hollow box-shaped structure. The guide has lids(11,12) on both ends of the longitudinal direction. The counter slide is installed inside the hollow box-shaped structure. The inner surface of the hollow box-shaped structure is used as a bearing surface of an air bearing of a counter slide and a guide. Two chambers(13,14) are formed on both sides of the guide. The two chambers are surrounded by the inner surface of the guide, the lid, and the counter slide.
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