发明名称 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor memory device includes a silicon pillar that is provided with a first channel formed in a first area on one side among two sides that are perpendicular to an extension direction of a bit line, a second channel formed in a second area on the other side among the two sides that is not overlapped with the first area in the extension direction of the bit line, and of which the other area on the two sides is an insulating oxide film formed by being oxidized, and two word lines that cover the one side and the other side of the silicon pillar via a gate insulating film, respectively. The first channel and the second channel are separated from each other in an insulating manner by the insulating oxide film.
申请公布号 US2010237406(A1) 申请公布日期 2010.09.23
申请号 US20100724599 申请日期 2010.03.16
申请人 ELPIDA MEMORY INC. 发明人 OYU KIYONORI
分类号 H01L27/105 主分类号 H01L27/105
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