发明名称 |
Verfahren zum Messen des Flüssigkeitspegels in einer Einkristallziehvorrichtung, die das CZ-Verfahren verwendet |
摘要 |
<p>Provided is a method for reliably and easily measuring a liquid level by selecting an optimal reflection method from among a plurality of reflection methods, depending on growing conditions of a pulled single crystal. The method comprises: setting a plurality of measuring methods having different ways of determining the liquid level; creating, in advance, information that associates with a gap between the outer peripheral face of the single crystal and a predetermined position located between a heat shield and the outer peripheral face of the single crystal; determining the gap in accordance with manufacturing conditions; selecting a measuring method associated to the determined gap, on the basis of the information; and measuring the liquid level of a melt surface in use of the selected measuring method.</p> |
申请公布号 |
DE112008002065(T5) |
申请公布日期 |
2010.09.23 |
申请号 |
DE20081102065T |
申请日期 |
2008.07.18 |
申请人 |
SUMCO TECHXIV CORP. |
发明人 |
HAYASHIDA, TOSHIO;KIHARA, AYUMI;TAKAMI, TAKUAKI |
分类号 |
C30B15/26;C30B29/06 |
主分类号 |
C30B15/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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