发明名称 Through-Gate Implant for Body Dopant
摘要 The present invention, provides a semiconductor device including a substrate including a semiconductor layer overlying an insulating layer, wherein a back gate structure is present underlying the insulating layer and a front gate structure on the semiconductor layer; a channel dopant region underlying the front gate structure of the substrate, wherein the channel dopant region has a first concentration present at an interface of the semiconductor layer and the insulating layer and at least a second concentration present at the interface of the front gate structure and the semiconductor layer, wherein the first concentration is greater than the second concentration; and a source region and drain region present in the semiconductor layer of the substrate.
申请公布号 US2010237417(A1) 申请公布日期 2010.09.23
申请号 US20100701972 申请日期 2010.02.08
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 WANG GENG;PARRIES PAUL C.
分类号 H01L27/12;H01L21/86 主分类号 H01L27/12
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