SYSTEM AND METHOD FOR NANOTUBE GROWTH VIA ION IMPLANTATION USING A CATALYTIC TRANSMEMBRANE
摘要
Ion implantation is used to grow nanotubes out of carbon and other materials. Catalytic materia! is placed on or in a membrane that physically and possibly environmental Iv separates an implantation chamber or region from a growth chamber or region. High-energy ions are implanted into the catalytic material from one side to grow nanotubes on an exposed surface in the growth chamber Ion implantation via the membrane provides for greater flexibility to separate and independently control the implantation and growth processes.
申请公布号
WO2009123807(A3)
申请公布日期
2010.09.23
申请号
WO2009US35291
申请日期
2009.02.26
申请人
RAYTHEON COMPANY;BARKER, DELMAR, L.;JORDAN, MEAD, M.;POISI, HOWARD, W.
发明人
BARKER, DELMAR, L.;JORDAN, MEAD, M.;POISI, HOWARD, W.