| 摘要 |
<p>Disclosed is a hollow microtube structure which can be used as a minimally invasive electrode, and a production method thereof. Further disclosed is a living organism inspection device which uses the abovementioned hollow microtube structure. The hollow microtube structure is provided with a semiconductor substrate (2) and a hollow microtube (4) formed on the surface of said semiconductor substrate. The hollow microtube is provided with a metal coating film layer (6) on the inner surface, and an insulating coating film layer (7) on the outer circumference. The semiconductor substrate has a through hole which connects to the inside of the hollow tube at the location of hollow tube formation. The production method comprises an etching step, a quasi-layer formation step, a metal coating film layer formation step, an insulating coating film layer formation step, a tip removal step, and a piercing step. The living organism inspection device is structured so as to be provided on the substrate side of the hollow microtube structure with at least one of an electric signal transmitter, an optical signal transmitter, a chemical injector, an electrical measuring instrument, a chemical measuring instrument, and an optical measuring instrument.</p> |
