发明名称 |
Method of Correcting Coordinates, and Defect Review Apparatus |
摘要 |
The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.
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申请公布号 |
US2010241386(A1) |
申请公布日期 |
2010.09.23 |
申请号 |
US20100792795 |
申请日期 |
2010.06.03 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
HIRAI TAKEHIRO;AOKI KAZUO;KANEKO KUMI |
分类号 |
G06F19/00;H01J37/20;H01J37/28;H01L21/66 |
主分类号 |
G06F19/00 |
代理机构 |
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