| 摘要 |
To provide an optical waveguide device which can allow a light-receiving element to be precisely aligned with a diffused waveguide formed in a dielectric substrate to implement an evanescent coupling light-receiving element. An optical waveguide device includes a dielectric substrate 1, a diffused waveguide 2 formed by thermally diffusing a high-refractive material into the dielectric substrate, and a light-receiving element 4 which is disposed above the diffused waveguide and which receives a part of an optical wave propagating in the diffused waveguide. Here, at least a part 3 of a pedestal 3 and 5 supporting the light-receiving element above the dielectric substrate is formed by disposing the high-refractive material in a predetermined pattern in the vicinity of the diffused waveguide and thermally diffusing the high-refractive material at the same time as forming the diffused waveguide.
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