LIQUID METAL ION SOURCE, SECONDARY IION MASS SPECTROMETER,SECONDARY ION MASS SPECTROMETRIC ANALYSIS METHOD AND USE THEREOF

摘要

A mass spectrometric method according to the Gentle SIMS (G-SIMS) method uses a liquid metal ion source which contains, on the one hand, a first metal with an atomic weight≧190 U and, on the other hand, another metal with an atomic weight≰90 U. One of the two types of ions are filtered out alternately from the primary ion beam and directed onto the target as a mass-pure primary ion beam.