发明名称 NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor memory device includes: a semiconductor substrate; a plurality of device isolation regions being disposed in an upper-layer portion of the semiconductor substrate, and dividing the upper-layer portion into a plurality of semiconductor portions extending in a first direction; a plurality of charge storage films which are disposed on one of the plurality of the semiconductor portions and spaced apart from one another in the first direction; a block insulating film disposed covering the plurality of charge storage films; and a word electrode disposed on the block insulating film for each of rows of the plurality of charge storage films arranged in a second direction intersecting the first direction, wherein the block insulating film is disposed continuously in the first direction and in the second direction.
申请公布号 US2010237399(A1) 申请公布日期 2010.09.23
申请号 US20100711512 申请日期 2010.02.24
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TOBA TAKAYUKI
分类号 H01L29/792;H01L21/28 主分类号 H01L29/792
代理机构 代理人
主权项
地址