发明名称 REGULATING VALVE DEVICE
摘要 <p>Provided is a regulating valve device which opens/closes a valve element by a working fluid. A valve element (310) has a structure in which a valve element head portion (310a) and a valve element body portion (310b) are coupled by a valve stem (310c). The valve element (310) and a power transmission member (320a) are slidably housed in a valve casing (305). A first bellows (320b) forms a first space (Us) in a position on the side opposite to the valve element with respect to the power transmission member (320a) by being fixed to the power transmission member (320a) and the valve casing (305). A second bellows (320c) forms a second space (Ls) in a position on the valve element side with respect to the power transmission member (320a) by being fixed to the power transmission member (320a) and the valve casing (305). Power is transmitted from the power transmission member (320a) to the valve element head portion (310a) according to the ratio between air supplied from a first pipe (320d) to the first space (Us) and air supplied from a second pipe (320e) to the second space (Ls), thereby opening/closing a transfer path (200a).</p>
申请公布号 WO2010106935(A1) 申请公布日期 2010.09.23
申请号 WO2010JP53749 申请日期 2010.03.08
申请人 FUJIKIN INCORPORATED;TOKYO ELECTRON LIMITED;TOHOKU UNIVERSITY;IKEDA, NOBUKAZU;YAMAJI, MICHIO;TANIGAWA, TSUYOSHI;KANEKO, HIROSHI;YAGI, YASUSHI;ONO, YUJI;OHMI, TADAHIRO;SHIRAI, YASUYUKI 发明人 IKEDA, NOBUKAZU;YAMAJI, MICHIO;TANIGAWA, TSUYOSHI;KANEKO, HIROSHI;YAGI, YASUSHI;ONO, YUJI;OHMI, TADAHIRO;SHIRAI, YASUYUKI
分类号 F16K31/122;F16K1/36;F16K1/42;F16K51/02;H01L21/205 主分类号 F16K31/122
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