申请人 |
FUJIKIN INCORPORATED;TOKYO ELECTRON LIMITED;TOHOKU UNIVERSITY;IKEDA, NOBUKAZU;YAMAJI, MICHIO;TANIGAWA, TSUYOSHI;KANEKO, HIROSHI;YAGI, YASUSHI;ONO, YUJI;OHMI, TADAHIRO;SHIRAI, YASUYUKI |
发明人 |
IKEDA, NOBUKAZU;YAMAJI, MICHIO;TANIGAWA, TSUYOSHI;KANEKO, HIROSHI;YAGI, YASUSHI;ONO, YUJI;OHMI, TADAHIRO;SHIRAI, YASUYUKI |