发明名称 |
VACUUM TREATMENT APPARATUS |
摘要 |
A transport arrangement (100) for bi-directionally transporting substrates towards and from a load lock (5) comprises a first substrate handler (1) swivelable about a first axis (A1) and with at least two first substrate carriers (1a, 1b). A second substrate handler (20) swivelable about a second axis (A20) comprises at least four second substrate carriers (20a to 20d). First and second substrate carriers are mutually aligned respectively in one position of their respective swiveling trajectory paths as one of the first substrate carriers is aligned with one of the second substrate carriers and the other of the first substrate carriers is aligned with the load lock (5). The first substrate carriers (1a, 1b) are movable towards and from the load lock (5) once aligned there with and thereby form respectively external valves of the load lock (5). |
申请公布号 |
WO2010105967(A2) |
申请公布日期 |
2010.09.23 |
申请号 |
WO2010EP53140 |
申请日期 |
2010.03.11 |
申请人 |
OC OERLIKON BALZERS AG;VOSER, STEPHAN;DOVIDS, GERHARD |
发明人 |
VOSER, STEPHAN;DOVIDS, GERHARD |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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