摘要 |
An apparatus of generating fluorinated gas compounds by means of reacting liquid stock with gaseous material is characterized by providing a circulating system comprised of a reaction chamber where a liquid mixture containing the liquid stock reacts with the gaseous material, a fluid conduit through which the liquid mixture alone flows, an upper fluid channel through which the reacted liquid mixture moves from the top of the reaction chamber to the top of the fluid conduit, and a lower fluid channel through which the liquid mixture moves from the bottom of the fluid conduit to the bottom of the reaction chamber, and sparging into the bottom of the reaction chamber (A) the virgin gaseous material and (B) at least one selected from the fluorinated gas compounds resulted from the reaction in the reaction chamber, including the first fluorinated gas product generated in the first cycle of the reaction and the second or later gas product resulted from further fluorinating the first or later gas product in the succeeding cycle, so as to circulate the liquid mixture.
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