发明名称 |
Measurement arrangement i.e. pH-sensor, for measuring ion concentration of measuring medium, has vibration exciter arranged in housing and mechanically coupled with chip for oscillating chip, where vibration exciter comprises transducer |
摘要 |
<p>The arrangement (1) has an ion-sensitive FET-semiconductor chip comprising an ion-sensitive surface section with a gate-region. A housing (4) for accommodating the chip has an opening, where the section is subjected with measuring medium through the opening. A seal runs around the section and the opening for sealing the section against an inner area of the housing. A vibration exciter i.e. piezoelectric-exciter, is arranged in the housing and mechanically coupled with the chip for oscillating the chip, where the vibration exciter comprises an ultrasonic transducer.</p> |
申请公布号 |
DE102009001632(A1) |
申请公布日期 |
2010.09.23 |
申请号 |
DE20091001632 |
申请日期 |
2009.03.18 |
申请人 |
ENDRESS + HAUSER CONDUCTA GESELLSCHAFT FUER MESS-UND REGELTECHNIK MBH + CO. KG |
发明人 |
BUSCHNAKOWSKI, STEPHAN;UHLE, JOERG |
分类号 |
G01N27/414;H01L23/48;H01L29/78 |
主分类号 |
G01N27/414 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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