| 摘要 |
A method of fabricating a solar cell is provided. A dopant material layer is deposited on a front surface of a semiconductor substrate and an over-depositing dopant layer is also formed on a back surface of the semiconductor substrate, wherein dopants of the dopant material layer diffuse into the front surface of the semiconductor substrate to form a doping layer and dopants of the over-depositing dopant layer diffuse into the back surface of the semiconductor substrate to form a doping residual layer during said depositing process. The dopant material layer and the over-depositing dopant layer are removed. An anti-reflective layer is formed on the doping layer. After the doping residual layer on the semiconductor substrate is removed to expose the back surface of the semiconductor substrate, a passivation layer is formed on the exposed back surface of the semiconductor substrate. Then, a first electrode and a second electrode are formed.
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