发明名称 ABNORMALITY DETECTING APPARATUS FOR DETECTING ABNORMALITY AT INTERFACE PORTION OF CONTACT ARM
摘要 An abnormality detecting apparatus includes an imaging device for obtaining image data of a TIM, a failure detecting section for detecting appearance failures of the TIM on the basis of the image data of the TIM obtained by the imaging device, and a determining device for determining whether an abnormality occurs at the TIM on the basis of a detection result by the failure detecting section.
申请公布号 US2010239155(A1) 申请公布日期 2010.09.23
申请号 US20100738780 申请日期 2010.04.19
申请人 ADVANTEST CORPORATION 发明人 ICHIKAWA MASAYOSHI;IKEDA HIROKI
分类号 G06K9/00 主分类号 G06K9/00
代理机构 代理人
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