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发明名称
摘要
申请公布号
JP4550182(B2)
申请公布日期
2010.09.22
申请号
JP19990139555
申请日期
1999.05.20
申请人
发明人
分类号
H01L29/78;H01L29/06;H01L29/10;H01L29/423
主分类号
H01L29/78
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