| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection optical system which can be mounted, for example, in a multi-scanning projection exposure apparatus, and which can preferably correct the axial stigmatism, while substantially suppressing the side effects in a simple constitution. SOLUTION: The projection optical system, for forming the image of a first face (M) onto a second face (P), is equipped with a first imaging optical system (K1) to form an intermediate image of the first plane; and a second imaging optical system (K2) for forming a final image onto the second plane based on the light flux from the intermediate image. The system has a first optical face and a second optical face which are disposed substantially apart from the first face and the second face and which are relatively rotatable about the optical axis of the projection optical system. The first optical face and the second optical face are formed into the respective toric faces, having different powers in directions perpendicular to each other. COPYRIGHT: (C)2006,JPO&NCIPI |
