发明名称 METHOD AND DEVICES FOR CONTROLLING A VAPOUR FLOW IN VACUUM EVAPORATION
摘要 The invention relates to a method and a device for the coating of running substrates (25) moving along a run direction through a treatment zone (6), in which the vapour of a coating material is generated in a chamber (5), this vapour passing through a treatment aperture towards the treatment zone (6) where the coating material condenses on the surface of the substrates (25). The vapour flow through the treatment aperture is controlled by adjusting the extent to which the treatment aperture is shut off by at least one shutter (13), between an open position, in which said vapour flows through the treatment aperture towards the treatment zone (6), and a closed position, in which the vapour is prevented from flowing towards the treatment zone (6) through the treatment aperture.
申请公布号 KR20100102129(A) 申请公布日期 2010.09.20
申请号 KR20107013853 申请日期 2008.12.22
申请人 IPST GMBH 发明人 VANDENBRANDE PIERRE
分类号 C23C14/24;C23C14/14;C23C14/54;C23C14/56 主分类号 C23C14/24
代理机构 代理人
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